Product


By design, Harmonic series technology offers great flexibility and accommodates a wide range of materials and processes.

Harmonic® Series

Wafer Metrology System

  • Patterned and blanket wafers

  • High throughput in-line system

  • Optical non-destructive technique

  • No sample prep, consumables or reagents

  • ISO Class 1 cleanroom mini-environment

  • 200 mm or 300 mm configurable

  • Dual load port EFEM

  • Bay and Chase or Ballroom compatible