See the Unseen

Leading advanced process control with patented Harmonic series optical technology.

Founded in 2011, FemtoMetrix® is the world leader in the optical Non-Visual Defect (NVD) category for surface and buried defects, delivering new metrology capabilities with its patented Harmonic series technology.

Harmonic® F Series
Metrology System

Tool Capabilities

  • Non Destructive Optical Technique
  • Sensitive Non Visual Defect Detection
  • High In-Line Throughput
  • Characterizes Surface and Buried Interfaces
  • Easy to Use and Interpret Software


Our Harmonic series metrology systems enable fabs to improve yield by detecting Non-Visual Defects (NVD) optically. These include surface and buried metallic and organic contamination, as well as other yield-killing non-uniformities that cannot be seen by other in-line tools.

Whether you're in a high-volume, advanced fab, in pilot production, development or a research lab, there's a Harmonic series tool that will enable you to improve yield and increase fab profitability.


The Harmonic series uses Optical Second Harmonic Generation (SHG). The technique is a non-destructive, contactless, optical characterization method for characterizing surfaces, interfaces, thin-films, as well as bulk properties of materials.


The Harmonic series utilizes Second Harmonic Generation to characterize stress/strain, layer thickness, electrically active impurities, structural defects, interface roughness and trapped charge density.

The resulting maps provide measurement of global uniformity and detection of localized defects. By design, Harmonic series technology offers great flexibility and accommodates a wide range of materials and processes.


FemtoMetrix® Closes Series A Financing Round Led By Samsung Ventures

At the end of August, 2016, FemtoMetrix completed its first round of equity financing in a deal led by Samsung's Venture Division. The round included financing from other related parties.

FemtoMetrix® Announces License Agreement With Boeing

"When we can redeploy our technology to help another company accelerate their innovation, we consider that a success," said Peter Hoffman, Boeing Vice President of Intellectual Property Management.

FemtoMetrix® Announces Korean Sales Agency With Ahtech LTS Co., Ltd.