By design, Harmonic series technology offers great flexibility and accommodates a wide range of materials and processes.

Harmonic® F Series

  • Patterned and blanket wafers
  • High throughput in-line system
  • Optical non-destructive technique
  • No sample prep, consumables or reagents
  • ISO Class 1 cleanroom mini-environment
  • 200 mm or 300 mm configurable
  • Dual load port EFEM
  • Bay and Chase or Ballroom compatible